TEM sample preparation and FIB-induced damage

MRS Bulletin

Volumn 32, Issue 5, 2007, Pages 400-407

  Mayer, Joachim ^a   Giannuzzi, Lucille A ^a   Kamino, Takeo ^a   Michael, Joseph ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; ELECTRON EMISSION; ENERGY DISPERSIVE X RAY ANALYSIS; OPTICAL RESOLVING POWER; TRANSMISSION ELECTRON MICROSCOPY;

ENERGY-DISPERSIVE X-RAY MAPPING; FOCUSED ION BEAM (FIB) WORKSTATION; ORGANIC MATERIALS;

FOCUSED ION BEAMS;

EID: 34249785085     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2007.63     Document Type: Article

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