The correlation between ion beam/material interactions and practical FIB specimen preparation

Microscopy and Microanalysis

Volumn 9, Issue 3, 2003, Pages 216-236

  Prenitzer, B I ^a,g   Urbanik Shannon, C A ^b,c   Giannuzzi, L A ^b   Brown, S R ^a   Irwin, R B ^a,d   Shofner, T L ^a,e   Stevie, F A ^a,f  

^a AGERE SYSTEMS   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

^c Accurel Systems International   (United States)

^d TEXAS INSTRUMENTS   (United States)

^e Thermo Fisher Scientific   (United States)

^f NORTH CAROLINA STATE UNIVERSITY   (United States)

^g NanoSpective   (United States)

Author keywords

Focused ion beam; Ion solid interactions; Redeposition TEM specimen preparation

Indexed keywords

ION;

ARTICLE; AUDIOVISUAL EQUIPMENT; COMPARATIVE STUDY; COMPUTER SIMULATION; DECISION SUPPORT SYSTEM; ELECTRON MICROSCOPY; ELECTRON PROBE MICROANALYSIS; INSTRUMENTATION; MASS SPECTROMETRY; METHODOLOGY; MONTE CARLO METHOD;

COMPUTER SIMULATION; DECISION MAKING, COMPUTER-ASSISTED; ELECTRON PROBE MICROANALYSIS; IONS; MICROSCOPY, ELECTRON; MODELS, STRUCTURAL; MONTE CARLO METHOD; SPECTROMETRY, MASS, SECONDARY ION;

EID: 0038266633     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927603030034     Document Type: Article

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