Performance of nanomanipulator fabricated on glass capollary by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 1, 2005, Pages 298-301

  Kometani, Reo ^a,b   Hoshino, Takayuki ^c   Kondo, Kazushige ^b   Kanda, Kazuhiro ^a,b   Haruyama, Yuichi ^a,b   Kaito, Takashi ^d   Fujita, Jun Ichi ^b,e   Ishida, Masahiko ^b   Ochiai, Yukinori ^b   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

^d SII NANOTECHNOLOGY INC   (Japan)

^e UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CHARGE; ELECTROSTATICS; FABRICATION; GLASS; ION BEAMS; NANOTECHNOLOGY;

3D NANOMANIPULATORS; MICROSPHERES;

MICROMANIPULATORS;

EID: 31144446021     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1849211     Document Type: Article

References (4)

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2. R. Kometani, T. Morita, K Watanabe, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, Jpn. J. Appl. Phys., Part 1 42, Pt. 1, No. 6B (2003).
3. R. Kometani, T. Morita, K. Watanabe, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, J. Vac. Sci. Technol. B 22, 257 (2004).
4. R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, Jpn. J. Appl. Phys., Part 1 (to be published).