Milling yield estimation in focused ion beam milling of two-layer substrates

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 20-28

  Tseng, Ampere A ^a   Insua, Ivan A ^a   Park, Jong Seung ^a   Chen, Chii D ^b  

^a Arizona State University   (United States)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COATING TECHNIQUES; COMMINUTION; CONTROLLABILITY; DEPOSITION; GOLD; MICROSTRUCTURE; SCHOTTKY BARRIER DIODES; SUBSTRATES;

CHANNEL STRUCTURES; FOCUSED ION BEAM (FIB); MILLING RATES; SUBMICRON STRUCTURES;

ION BEAMS;

EID: 12344269867     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/004     Document Type: Article

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