Measurements and calculations of FIB milling yield of bulk metals

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1540-1543

  Mulders, J J L ^a   de Winter, D A M ^b   Duinkerken, W J H C P ^b  

^a Thermo Fisher Scientific   (United States)

^b FONTYS UNIVERSITY OF APPLIED SCIENCES   (Netherlands)

Author keywords

Channeling; Ion beam milling yield; Metals; SRIM

Indexed keywords

ALUMINUM; BRASS; COMMINUTION; NANOSTRUCTURED MATERIALS; STAINLESS STEEL; SUBSTRATES;

BULK METALS; ION BEAM MILLING YIELD; ION CHANNELLING EFFECTS; NANOSCALE STRUCTURES; SRIM;

FOCUSED ION BEAMS;

EID: 34247842868     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.206     Document Type: Article

References (4)

1. Giannuzzi L.A., Prenizter B.I., and Kempshall B.W. Introduction to Focused Ion Beams. Instrumentation, Theory, Techniques and Practice (2005), Springer Science/Business Media Inc., New York Chapter 2
2. Adams D.P., and Vasile M.J. J. Vac. Sci. B 24 2 (2006) 836-844
3. Kempshall B.W., Schwarz S.M., Prenitzer B.I., Giannuzzi L.A., Irwin R.B., and Stevie F.A. J. Vac. Sci B 19 3 (2001) 749-754
4. See: www.srim.org.