Focused ion beam fabrication of thermally actuated bimorph cantilevers

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 608-613

  Teng, J ^a   Prewett, P D ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Bimorph; Cantilever; FIB; MEMS prototyping

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; SCANNING ELECTRON MICROSCOPY;

BIMORPH; CANTILEVERS; FOCUSED ION BEAM (FIB) TECHNOLOGY; MEMS PROTOTYPING; SILICON NITRIDE MEMBRANE CHIPS;

SILICON NITRIDE;

EID: 24944515328     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.030     Document Type: Conference Paper

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