Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2834-2837

  Fujita, J ^a   Ishida, M ^a   Sakamoto, T ^a   Ochiai, Y ^a   Kaito, T ^b   Matsui, S ^c  

^a NEC CORPORATION   (Japan)

^b SEIKO INSTRUMENTS INC   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; MECHANICAL VARIABLES MEASUREMENT; NANOSTRUCTURED MATERIALS; RESONANCE; SCANNING ELECTRON MICROSCOPY; STIFFNESS; VAPOR PRESSURE; VIBRATIONS (MECHANICAL);

PHENANTHRENE VAPOR; PILLARS; THREE DIMENSIONAL NANOSTRUCTURES;

DIAMOND LIKE CARBON FILMS;

EID: 0035519114     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1417545     Document Type: Article

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