Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 232, Issue 1-4, 2005, Pages 362-366

  Kometani, Reo ^a,b   Hoshino, Takayuki ^b,c   Kanda, Kazuhiro ^a,b   Haruyama, Yuichi ^a,b   Kaito, Takashi ^d   Fujita, Jun Ichi ^b,e   Ishida, Masahiko ^b,f   Ochiai, Yukinori ^b,f   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c SII NANOTECHNOLOGY INC   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

^e UNIVERSITY OF TSUKUBA   (Japan)

^f NEC CORPORATION   (Japan)

Author keywords

3 D; FIB CVD; Nano net; Nano tool; Subcellular operation

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTROSTATICS; ION BEAMS; POLYSTYRENES; PRESSURE EFFECTS; THREE DIMENSIONAL;

FOCUSED-ION-BEAM CHEMICAL-VAPOR-DEPOSITION (FIB-CVD); NANO-NET; NANO-TOOL; SUBCELLULAR OPERATION;

NANOSTRUCTURED MATERIALS;

EID: 19944408624     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.074     Document Type: Conference Paper

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