Focused ion beam machining and deposition for nanofabrication

Vacuum

Volumn 47, Issue 5, 1996, Pages 455-462

  Davies, S T ^a   Khamsehpour, B ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION SOURCES; MICROMACHINING; NANOTECHNOLOGY; SEMICONDUCTOR DEVICE MANUFACTURE;

FOCUSED ION BEAM DEPOSITION (FIBD); FOCUSED ION BEAM MICROMACHINING (FIBM); LIQUID METAL ION SOURCE (LMIS);

ION BEAMS;

EID: 0030151195     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(95)00235-9     Document Type: Article

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