Automatic measurement of electron-beam diameter and astigmatism: BEAMETR

Physics Procedia

Volumn 1, Issue 1, 2008, Pages 113-118

  Babin, S ^a   Gaevski, M ^b   Joy, D ^c,d   Machin, M ^a   Martynov, A ^a  

^a ABEAM TECHNOLOGIES   (United States)

^b UNIVERSITY OF SOUTH CAROLINA   (United States)

^c UNIVERSITY OF TENNESSEE   (United States)

^d OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Electron probe diameter; SEM resolution; Software

Indexed keywords

EID: 54149118064     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2008.07.085     Document Type: Conference Paper

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