Accurate parameter extraction for the simulation of direct structuring by ion beams

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 810-813

  Beuer, S ^a   Rommel, M ^a   Lehrer, Ch ^a   Platzgummer, E ^b   Kvasnica, S ^b   Bauer, A J ^a   Ryssel, H ^a,c  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b IMS NANOFABRICATION AG   (Austria)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Ion beam; Profile; Simulation; Sputtering; Surface erosion

Indexed keywords

COMPUTER SIMULATION; NANOSTRUCTURED MATERIALS; PARAMETER EXTRACTION; SPUTTERING;

ANGLE OF INCIDENCE; PARAMETER VALUES; SURFACE EROSION;

ION BEAMS;

EID: 34247606754     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.033     Document Type: Article

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