Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering

International Journal of Advanced Manufacturing Technology

Volumn 31, Issue 5-6, 2006, Pages 501-508

  Ali, M Y ^a   Ong, A S ^b  

^a INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Focused ion beam (FIB); Microchannel; Micromachining; Microtool; Wire electrodischarge grinding (WEDG)

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRINDING (MACHINING); ION BEAMS; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SPUTTERING;

FOCUSED ION BEAM (FIB); MICROCHANNELS; MICROTOOLS; WIRE ELECTRODISCHARGE GRINDING (WEDG);

MACHINE TOOLS;

EID: 33751195717     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-0220-9     Document Type: Article

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