SCOPUS 정보 검색 플랫폼

Volumn 8, Issue 7, 2006, Pages

Focused ion beam fabrication of one-dimensional photonic crystals on Si3N4/SiO2 channel waveguides

Author keywords

Focused ion beam lithography; Optical waveguide; Photonic band gap; Photonic crystals

Indexed keywords

ENERGY GAP; ION BEAMS; LITHOGRAPHY; SILICA; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; WAVEGUIDES;

FOCUSED ION BEAM LITHOGRAPHY; OPTICAL WAVEGUIDE; PHOTONIC BAND-GAP; PHOTONIC CRYSTALS;

CRYSTALS;

EID: 33745193020 PISSN: 14644258 EISSN: 17413567 Source Type: Journal
DOI: 10.1088/1464-4258/8/7/S39 Document Type: Article

Times cited : (7)

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