Nanoscale hybrid manufacturing process by nano particle deposition system (NPDS) and focused ion beam (FIB)

CIRP Annals - Manufacturing Technology

Volumn 60, Issue 1, 2011, Pages 583-586

  Ahn, S H ^a   Chun, D M ^a   Kim, C S ^a  

^a Seoul National University   (South Korea)

Author keywords

Nano manufacturing; Rapid prototyping; Surface

Indexed keywords

MANUFACTURING PROCESS; NANO SCALE; NANO-MANUFACTURING; NANO-SIZED PARTICLES; NANO-STRUCTURING; PROTOTYPING; ROOM TEMPERATURE; ROOM TEMPERATURE DEPOSITION; SUPERSONIC SPEED; UNIQUE FEATURES;

BINDERS; FOCUSED ION BEAMS; INDUSTRIAL ENGINEERING; NANOPARTICLES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PRODUCTION ENGINEERING; RAPID PROTOTYPING; THIN FILMS; VAPOR DEPOSITION;

MANUFACTURE;

EID: 79957645461     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2011.03.071     Document Type: Article

References (14)

1. M. Patil, D.S. Mehta, and S. Guvva Future impact of nanotechnology on medicine and dentistry Journal of Indian Society of Periodontlogy 12 2 2008 34 40
2. J. Altmann Military uses of nanotechnology: perspectives and concerns Security Dialogue 35 1 2004 61 79 (Pubitemid 38522467)
3. C. Hierold From micro- to nanosystems: mechanical sensors go nano Journal of Micromechanics and Microengineering 14 2004 1 11
4. Y. Qin, A. Brockett, Y. Ma, A. Razali, J. Zhao, C. Harrison, W. Pan, X. Dai, and D. Loziak Micro-manufacturing: research, technology outcomes and development issues International Journal of Advanced Manufacturing Technology 47 9-12 2010 821 837
5. C.L. Kuo, J.D. Huang, and H.Y. Liang Fabrication of 3D metal microstructures using a hybrid process of micro-EDM and laser assembly International Journal of Advanced Manufacturing Technology 21 10-11 2003 796 800
6. D.M. Chun, M.H. Kim, J.C. Lee, and S.H. Ahn A nano-particle deposition system for ceramic and metal coating at room temperature and low vacuum conditions International Journal of Precision Engineering and Manufacturing 9 1 2008 51 53
7. S. Reyntjens, and R. Puers A review of focused ion beam applications in microsystem technology Journal of Micromechanics and Microengineering 11 2010 287 300
8. F.Z. Fang, Z.W. Xua, X.T. Hua, C.T. Wangc, X.G. Luoc, and Y.Q. Fud Nano-photomask fabrication using focused ion beam direct writing CIRP Annals - Manufacturing Technology 59 1 2010 543 546
9. C.S. Kim, S.H. Ahn, and D.Y. Jang Nanoscale effects in carbon structures fabricated using focused ion beam-chemical vapour deposition Thin Solid Films 518 18 2010 5177 5182
10. C.S. Kim, H.J. Kim, S.H. Ahn, and D.Y. Jang Morphological influence of the beam overlap in focused ion beam induced deposition using raster scan Microelectronic Engineering 87 5-8 2010 972 976
11. M.Y. Ali, W. Hung, and F. Yongqi A review of focused ion beam sputtering International Journal of Precision Engineering and Manufacturing 11 1 2010 157 170
12. 2 coating on metal and polymer substrates by nano particle deposition system (NPDS) CIRP Annals - Manufacturing Technology 57 1 2008 551 554
13. D.M. Chun, M.S. Kim, J.C. Yeo, M.H. Kim, S.H. Ahn, and C.S. Lee Nano/micro particle beam for ceramic deposition and mechanical etching Physica Scripta 139T 2010 014047
14. K. Jung, W. Song, D.M. Chun, Y.H. Kim, J.C. Yeo, M.S. Kim, S.-H. Ahn, and C.S. Lee Nickel line patterning using silicon supersonic micronozzle integrated with a nanoparticle deposition system Japanese Journal of Applied Physics 49 2010 05EC09