Atom probe specimen preparation with a dual beam SEM/FIB miller

Ultramicroscopy

Volumn 107, Issue 9, 2007, Pages 761-766

  Miller, M K ^a   Russell, K F ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Atom probe; Local electrode

Indexed keywords

ELECTROLYTIC POLISHING; FOCUSED ION BEAMS; GRAIN BOUNDARIES; MICROSTRUCTURE; POWDERS; SCANNING ELECTRON MICROSCOPY;

ATOM PROBES; LIFT OUT (LO) METHODS; LOCAL ELECTRODES; SURFACE FINISHES; TAPER ANGLE OF SPECIMENS; THIN RIBBONS;

SPECIMEN PREPARATION;

ION; PLATINUM;

ARTICLE; ATOM; BIOPOLISHING; MATERIALS; POWDER; SCANNING ELECTRON MICROSCOPE; TECHNIQUE;

EID: 34249060959     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2007.02.023     Document Type: Article

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