Microfabrication of microlens array by focused ion beam technology

Microelectronic Engineering

Volumn 54, Issue 3-4, 2000, Pages 211-221

  Fu, Yong Qi ^a   Kok, Ngoi ^a   Bryan, Ann ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIFFRACTION; INTERFEROMETERS; ION BEAMS; NANOTECHNOLOGY; OPTICAL DEVICES; SILICA;

FOCUSSED ION BEAMS; MICROFABRICATION; MICROLENS;

OPTICAL INSTRUMENT LENSES;

EID: 0034512455     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00416-0     Document Type: Article

References (6)

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