In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

Micron

Volumn 39, Issue 8, 2008, Pages 1325-1330

  Langford, R M ^a   Rogers, M ^b,c  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^c AMS AG   (Austria)

Author keywords

FIB; In situ lift out; TEM

Indexed keywords

WATER POLLUTION;

FIB; IN SITU LIFT-OUT; IN-SITU; TEM; TEM SAMPLE PREPARATION;

FOCUSED ION BEAMS;

ARTICLE; COMPARATIVE STUDY; METHODOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

MICROSCOPY, ELECTRON, TRANSMISSION;

EID: 52249124140     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2008.02.006     Document Type: Article

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