Electron beam size determination based on an intelligent substrate

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1429-1432

  Weigand, Helmut ^a   Fleischer, Monika ^a   Kern, Dieter P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Beam size; Electron beams; Probe size

Indexed keywords

COMPUTATIONAL METHODS; ELECTRIC CURRENTS; ELECTRONS; INTELLIGENT MATERIALS; SIZE DETERMINATION; SUBSTRATES;

BEAM SIZE; PROBE SIZE;

ELECTRON BEAMS;

EID: 44149118005     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.015     Document Type: Article

References (3)

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2. Chisholm T. J. Vac. Sci. Technol. B 6 6 (1988) 2066
3. Owen G. J. Vac. Sci. Technol. 16 6 (1979) 1715