Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 249-256

  Puers, Robert ^a   Reyntjens, Steve ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Absolute pressure sensors; Direct write deposition; Focused ion beam; Three dimensional micromachining; Vacuum encapsulation; Vacuum packaging

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE MEASUREMENT; ENCAPSULATION; PRESSURE EFFECTS; VACUUM APPLICATIONS;

CUSTOM VACUUM ENCAPSULATIONS; FOCUSED ION BEAM; VACUUM PACKAGING;

ION BEAM ASSISTED DEPOSITION;

EID: 0035426222     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00557-X     Document Type: Article

References (20)

1. Critical review: Focused ion beam technology and applications
2. Focused ion beam deposition of new materials: Dielectric films for device modification and mask repair, and Ta films for X-ray mask repair
3. Focused ion beam as an inspection tool for microsystem technology
4. Microcircuit modification using focused ion beams
5. Focused ion beam technology for integrated circuit modification, solid state technology
6. Focused ion beam induced tungsten deposition for repair of clear defects on X-ray masks
7. Focused ion beam sample preparation for TEM
8. Focused ion beam system for automated MEMS prototyping and processing
9. A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process
10. Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
11. Focused ion beam induced deposition: Fabrication of three-dimensional microstructures and Young's modulus of the deposited material
12. Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm
13. The application of fine-grained, tensile polysilicon to mechanically resonant transducers
14. Electrostatically driven vacuum-encapsulated polysilicon resonators. Part I. Design and fabrication
15. Vacuum sealing of microcavities using metal evaporation
16. Vacuum encapsulation of resonant devices using permeable polysilicon
17. Microfabrication of three-dimensional boron structures by laser chemical processing
18. Laser chemical vapour deposition for microelectronics
19. Development of a miniature pressure transducer for biomedical applications