Focused ion beam analysis technology

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Volumn , Issue , 1998, Pages 311-314

  Wang, Jia Ji ^a   Chang, Xu ^a   Zong, Xiang Fu ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; MICROELECTRONICS; TRANSMISSION ELECTRON MICROSCOPY; VLSI CIRCUITS;

FOCUSED ION BEAM (FIB) TECHNOLOGY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032226921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)