Polymer gratings achieved by focused ion beam

Synthetic Metals

Volumn 127, Issue 1-3, 2002, Pages 307-311

  Aubry, C ^a   Trigaud, T ^a   Moliton, J P ^a   Chiron, D ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

DOEs; FIB; Grating; Polymers

Indexed keywords

DEMULTIPLEXING; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; ETCHING; FLUORINE CONTAINING POLYMERS; ION BEAMS; ION BOMBARDMENT; WAVELENGTH DIVISION MULTIPLEXING;

DIFFRACTIVE OPTICAL ELEMENTS (DOE); FOCUSED ION BEAMS (FIB);

POLYMETHYL METHACRYLATES;

EID: 0037177157     PISSN: 03796779     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0379-6779(01)00644-0     Document Type: Article

References (7)

1. The fabrication of fine lens array by laser beam writing