Estimation of keV submicron ion beam width using a knife-edge method

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 211, Issue 3, 2003, Pages 415-424

  Ishii, Yasuyuki ^a   Isoya, Akira ^a,b   Kojima, Takuji ^a   Arakawa, Kazuo ^a  

^a TAKASAKI ADVANCED RADIATION RESEARCH INSTITUTE   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

Beam width measurement system; Flat top; Gaussian; Knife edge; Submicron ion beam; Uniform

Indexed keywords

EXTRAPOLATION; ION IMPLANTATION; NONDESTRUCTIVE EXAMINATION; SPUTTERING;

SPATIAL RESOLUTION;

ION BEAMS;

EID: 0141998056     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01370-3     Document Type: Article

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