Recent developments in micromilling using focused ion beam technology

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages

  Tseng, Ampere A ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM LITHOGRAPHY; ION BEAMS; MASKS; MICROMACHINING; MICROSTRUCTURE; MILLING (MACHINING); PHOTOLITHOGRAPHY; ROTATION;

FOCUSED ION BEAM (FIB) TECHNOLOGY; ION OPTICS; MICROFABRICATION; MICROMILLING;

MICROELECTRONIC PROCESSING;

EID: 2342636455     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/R01     Document Type: Review

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