Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 257-263

  Kometani, Reo ^a,b   Morita, Takahiko ^a,b   Watanabe, Keiichiro ^a,b   Hoshino, Takayuki ^b   Kondo, Kazushige ^b   Kanda, Kazuhiro ^a,b   Haruyama, Yuichi ^a,b   Kaito, Takashi ^c   Fujita, Jun Ichi ^b,d   Ishida, Masahiko ^b,d   Ochiai, Yukinori ^b,d   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c SEIKO INSTRUMENTS INC   (Japan)

^d NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPILLARY TUBES; CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC CHARGE; ETCHING; GLASS; ION BEAMS; ION BOMBARDMENT; MANIPULATORS; OPTICAL MICROSCOPY;

COMPUTER PATTERN GENERATOR (CPG) SYSTEMS; FOCUSED ION BEAMS (FIB); NANOMANIPULATORS;

NANOSTRUCTURED MATERIALS;

EID: 12144291212     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1643056     Document Type: Conference Paper

References (3)

1. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, J. Vac. Sci. Technol. B 18, 3181 (2000).
2. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui, J. Vac. Sci. Technol. B 19, 2834 (2001).
3. R. Kometani, T. Morita, K. Watanabe, K. Knada, Y. Haruyama, T. Kiato, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, Jpn. J. Appl. Phys., Part 1 (to be published).