Focused ion beam induced deposition of superconducting thin films

Physica C: Superconductivity and its Applications

Volumn 426-431, Issue II, 2005, Pages 1547-1551

  Sadki, E S ^a   Ooi, S ^a   Hirata, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

FIB; IBID; Superconducting devices; Thin films

Indexed keywords

CONCENTRATION (PROCESS); GALLIUM; ION BEAMS; MAGNETIC FIELDS; SUPERCONDUCTING DEVICES; THIN FILMS; TUNGSTEN COMPOUNDS;

ATOMIC CONCENTRATIONS; ELECTRON PROBE MICROANALYSIS (EPMA); FIB; IBID;

SUPERCONDUCTING FILMS;

EID: 25444497991     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physc.2005.02.151     Document Type: Article

References (30)

1. J. Melngailis J. Vac. Sci. Technol. B 5 1987 469
2. S. Matsui, and Y. Ochiai Nanotechnology 7 1996 247
3. R.M. Langford, A.K. Petford-Long, M. Rommeswinkle, and S. Eagelkamp Mater. Sci. Technol. 18 2002 743
4. K. Gamo, N. Takakura, N. Samoto, R. Shimizu, and S. Namba Jpn. J. Appl. Phys. Part 2 23 1984 L293
5. A. Wagner, J.P. Levin, J.L. Mauer, P.G. Blauner, S.J. Kirch, and P. Longo J. Vac. Sci. Technol. B 8 1990 1557
6. J. Fujita, M. Ishida, T. Ichihashi, Y. Ochiai, T. Kaito, and S. Matsui Nucl. Instrum. Methods Phys. Res., Sect. B 206 2003 472
7. K. Gamo, D. Takehara, Y. Hamamura, M. Tomita, and S. Namba Microelectron. Eng. 5 1986 163
8. J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui Jpn. J. Appl. Phys., Part 1 41 2002 4423
9. K.A. Telari, B.R. Rogers, H. Fang, L. Shen, R.A. Weller, and D.N. Braski J. Vac. Sci. Technol. B 20 2002 590
10. S. Lipp, L. Frey, C. Lehrer, B. Frank, E. Demm, S. Pauthner, and H. Ryssel J. Vac. Sci. Technol. B 14 1996 3920
11. Y. Iijima, N. Tanabe, O. Kohno, and Y. Ikeno Appl. Phys. Lett. 60 1992 769
12. Y. Iijima, K. Kakimoto, Y. Yamada, T. Izumi, T. Saitoh, and Y. Shiohara MRS Bull. 29 2004 564
13. S. Nagamachi, Y. Yamakagi, M. Ueda, H. Maruno, K. Shinada, Y. Fujiyama, and M. Asari Appl. Phys. Lett. 65 1994 3278
14. E.S. Sadki, S. Ooi, and K. Hirata Appl. Phys. Lett. 85 2004 6206
15. H. Langfischer, B. Basnar, H. Hutter, and E. Bertagnoli J. Vac. Sci. Technol. A 20 2002 1408
16. E.S. Sadki, Z.H. Barber, S.J. Lloyd, M.G. Blamire, and A.M. Campbell Phys. Rev. Lett. 85 2000 4168
17. M. Tinkham Introduction to Superconductivity 1996 McGraw-Hill New York
18. N.R. Werthamer, E. Helfand, and P.C. Hohenberg Phys. Rev. 147 1966 295
19. P. Berghuis, A.L.F. van der Slot, and P.H. Kes Phys. Rev. Lett. 65 1990 2583
20. M. Kambara, N. Hari Babu, E.S. Sadki, J.R. Cooper, H. Minami, D.A. Cardwell, A.M. Campbell, and I.H. Inoue Supercond. Sci. Technol. 14 2001 L5
21. Y.B. Koh, K. Gamo, and S. Namba J. Vac. Sci. Technol. B 9 1991 2648
22. D.W.K. Jenkins, G.C. Allen, P.D. Prewett, and P.J. Heard J. Phys.: Condens. Matter 3 1991 S199
23. W.L. Bond, A.S. Cooper, K. Andres, G.W. Hull, T.H. Geballe, and B.T. Matthias Phys. Rev. Lett. 15 1965 260
24. S. Basavaiah, and S.R. Pollack J. Appl. Phys. 39 1968 5548
25. M.M. Collver, and R.H. Hammond Phys. Rev. Lett. 30 1973 92
26. S. Kondo J. Mater. Res. 7 1992 853
27. R.H. Willens, and E. Buehler Appl. Phys. Lett. 7 1965 25
28. J. Flasck, J. Wood, A.S. Edelstein, J.E. Keem, and F.P. Missell Solid State Commun. 44 1982 649
29. S.J.M. Bakker, H.M. Jaeger, T.M. Klapwijk, E. van der Drift, and S. Radelaar Phys. Rev. B 48 1993 4168
30. M.S. Osofsky, R.J. Soulen Jr., J.H. Claassen, G. Trotter, H. Kim, and J.S. Horwitz Phys. Rev. Lett. 87 2001 197004