Micrometer-scale machining: Tool fabrication and initial results

Precision Engineering

Volumn 19, Issue 2-3, 1996, Pages 180-186

  Vasile, Michael J ^a   Friedrich, Craig R ^a   Kikkeri, Bharath ^a   McElhannon, Rob ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Micromachining; Microtools; Ultraprecision

Indexed keywords

CONTROL SYSTEMS; FABRICATION; GEOMETRY; MILLING MACHINES; NUMERICAL METHODS; PRECISION ENGINEERING;

MICROTOOLS;

MICROMACHINING;

EID: 0030261455     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(96)00024-4     Document Type: Article

References (9)

1. Higuchi, T. and Yamagata, Y. "Micro-machining by machine tools," Proceedings of the MEMS 1993 Workshop on micro-electro mechanical systems, Fort Lauderdale, Florida, 7-10 Feb. 1993
2. Becker, E. W., Ehrfeld, W., Hagmann, P. and Munchmeyer, D. "Fabrication of microstructures with high aspect ratios and great structural height by synchrotron radiation lithography, galvanoforming and plastic molding (LIGA process), " Microelectric Eng 1986, 4, 35-56
3. Vasile, M. J., Grigg, D. A., Griffith, J. E., Fitzgerald, E., A. and Russel, P. E. "Scanning probe tips formed by focused ion beams," Rev Sci Instrum 1991, 62, 2167
4. Vasile, M. J., Grigg, D. A., Griffith, J. E., Fitzgerald, E. A. and Russell, P. E. "Scanning probe tip geometry optimized for metrology by focused ion beam milling," J Vac Sci Technol 1991, B9, 3569
5. Griffith, J. E., Grigg, D. A., Vasile, M. J., Russell, P. E. and Fitzgerald, E. A. "Characterization of scanning probe microscope tips for line width measurement," J Vac Sci Technol 1991, B9, 3586
6. Vasile, M. J., Biddick, C. J. and Huggins, H. "Formation of probe microscope tips in silicon by focused ion beams," Appl Phys Lett 1994, 64, 575
7. Vasile, M. J., Biddick, C. J. and Schwalm, S. A. "Microfabrication by ion milling: The lathe technique," in Micromechanical Systems, Book H00832, A. P. Pisan, J. Jara-Almonte and W. Trimmer, eds. DSC-Vol, 46, New York: ASME, 1993, p. 81
8. Vasile, M. J., Biddick, C. J. and Schwalm, S. A. "Microfabrication by ion milling: The lathe technique," J Vac Sci Technol 1994, B12, 2388
9. Friedrich, C. R. and Vasile, M. J. "Development of the micromilling process for high aspect ratio microstructures," J MEMS, vol 5, (1) 1996, 33