Focused-ion-beam deposition for 3-D nanostructure fabrication

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 758-764

  Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTROSTATIC ACTUATORS; FOCUSED ION BEAMS; MICROSTRUCTURE; NANOSTRUCTURES;

FOCUSED-ION-BEAM CHEMICAL-VAPOR-DEPOSITION (FIB-CVD); MICROBEAM TECHNOLOGY; MICROSTRUCTURE PLASTICS; NANOSTRUCTURE FABRICATION;

MICROFABRICATION;

EID: 33947684492     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.077     Document Type: Article

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