Study of precursor gases for focused ion beam insulator deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3311-3314

  Edinger, K ^a   Melngailis, J ^a   Orloff, J ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242304620     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590497     Document Type: Article

References (6)

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