Rapid prototyping of nanostructured materials with a focused ion beam

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5010-5014

  Wilhelmi, Oliver ^a   Reyntjens, Steve ^a   Mitterbauer, Christoph ^a   Roussel, Laurent ^a   Stokes, Debbie J ^a   Hubert, Dominique H W ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

DualBeam; FIB SEM; Nano prototyping; Nanofabrication

Indexed keywords

ATOMS; BEAM PLASMA INTERACTIONS; CONCURRENT ENGINEERING; ELECTROLYSIS; ELECTROMAGNETIC WAVES; ION BEAMS; ION BOMBARDMENT; IONS; JOB ANALYSIS; MECHANICAL PROPERTIES; MICROSCOPIC EXAMINATION; NANOLITHOGRAPHY; RAPID PROTOTYPING; SECONDARY EMISSION; WATER POLLUTION;

COMPLEX PARAMETERS; DUALBEAM; ELECTRICAL AND MECHANICAL PROPERTIES; FIB SEM; FOCUSED ION BEAM TECHNOLOGIES; HIGH-PERFORMANCE; HIGH-RESOLUTION; NANO-PROTOTYPING; NANOFABRICATION; NANOLITHOGRAPHIC STRUCTURES; NEW STRATEGIES; REACTIVE GASES; SPECIFIC EFFECTS;

FOCUSED ION BEAMS;

EID: 55049108942     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5010     Document Type: Article

References (8)

1. P. M. Nellen, V. Callegari, and R. Brönnimann: Microelectron. Eng. 83 (2006) 1805.
2. Y. Q. Fu, N. Kok, and A. Bryan: Mieroelectron. Eng. 54 (2000) 211.
3. D. J. Stokes, T. Vystavel, and F. Morrissey: J. Phys. D 40 (2007) 874.
4. B. T. Prenitzer, C. A. Urbanik-Shannon, L. A. Gianuzzi, S. R. Brown, R. B. Irwin, T. L. Shofner, and F. A. Stevie: Microsc. Microanal. 9 (2003) 216.
5. L. A. Giannuzzi, B. I. Prenitzer, and B. W. Kempshall: in Introduction to Focused Ion Beams, ed. L. A. Giannuzzi and F. A. Stevie (Springer, New York, 2005) p. 13.
6. L. A. Giannuzzi, R. Geurts, and J. Ringnalda: Microsc. Microanal. 11 (2005) Suppl., 828.
7. V. Callegari and P. Nellen: Phys. Status Solidi A 204 (2007) 1665.
8. V. Callegari, P. Nellen, U. Sennhauser, P. Strasser, and F. Robin: presented at 51 st Int. Conf. Electron, Ion, Photon Beam Technology for Nanofabrication, Denver, CO, U.S.A., PL-5, 2007.