Stress-induced curvature of focused ion beam fabricated microcantilevers

Micro and Nano Letters

Volumn 3, Issue 1, 2008, Pages 25-28

  Prewett, P D ^a   Anthony, C J ^a   Cheneler, D ^a   Ward, M C L ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; FOCUSED ION BEAMS; ION IMPLANTATION; METAL IONS;

CASIMIR FORCE; GALLIUM IONS; MICROCANTILEVERS;

MICROSTRUCTURE;

GALLIUM; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DEVICE; MATHEMATICAL MODEL; MECHANICAL STRESS; MICROCANTILEVER; THICKNESS;

EID: 41549143202     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl:20070072     Document Type: Article

References (8)

1. Binnig, G., and Rohrer, H.: ' The scanning tunnelling microscope ', Sci Am, 1985, 253, p. 40 0036-8733
2. Mohideen, U., and Roy, A.: ' Precision measurement of the Casimir Force from 0.1 to 0.9 μm ', Phys. Rev. Lett., 1998, 81, p. 4549-4552 0031-9007
3. Derjaguin, B.V., Abrikosova, I.I., and Lifshitz, E.M.: ' Direct measurement of molecular attraction between solids separated by a narrow gap ', Quarterly Reviews (London), 1956, 10, p. 295-329
4. Prewett, P.D., and Mair, G.L.R.: ' Focused ion beams from liquid metal ion sources ', (Wiley, Research Studies Press, Taunton, UK, 1991)
5. Prewett, P.D., Marriott, P., and Bishop, H.E.: ' Microcircuit machining using focused ion beams-a note on the role of SIMS for end point detection ', Microelectron. Eng., 1989, 10, p. 1-9 0167-9317
6. Prewett, P.D., and Heard, P.J.: ' Repair of opaque defect in photomasks using focused ion beams ', J. Phys. D: Appl., Phys., 1987, 20, p. 1207-1209 0022-3727
7. Ziegler, J.F., Ziegler, M.D., and Biersack, J.P.: ' The stopping and range of ions in matter ', SRIM-2006.02
8. Flinn, P.A., Gardner, D.S., and Nix, W.D.: ' Measurement and Interpretation of stress in aluminum-based metallization as a function of terminal history ', IEEE Trans. Electron Dev., 1987, 34, (3), p. 689-699 0018-9383