A study of fused silica micro/nano patterning by focused-ion-beam

Applied Surface Science

Volumn 253, Issue 7, 2007, Pages 3608-3614

  Li, Wuxia ^a   Lalev, Georgi ^a   Dimov, Stefan ^a   Zhao, Hao ^a   Pham, D T ^a  

^a CARDIFF UNIVERSITY   (United Kingdom)

Author keywords

Focused ion beam; Fused silica; Micro nano patterning; Sputtering rate; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; FUSED SILICA; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SILICA; SPUTTERING;

FOCUSED-ION-BEAM (FIB) SYSTEM; MICRO/NANO PATTERNING; SPUTTERING RATE;

ION BEAMS;

EID: 33846439754     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.07.072     Document Type: Article

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