Low dielectric constant materials for microelectronics

Journal of Applied Physics

Volumn 93, Issue 11, 2003, Pages 8793-8841

  Maex, K ^a,b   Baklanov, M R ^a   Shamiryan, D ^a,b   Iacopi, F ^a,b   Brongersma, S H ^a   Yanovitskaya, Z S ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIFFUSION; ORGANIC POLYMERS; PERMITTIVITY; PLASTIC FILMS; POROSITY;

ORGANIC POLYMER FILMS;

DIELECTRIC MATERIALS;

EID: 0037666297     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1567460     Document Type: Article

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