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Materials Research Society Symposium - Proceedings

Volumn 612, Issue , 2000, Pages

Probing pore characteristics in low-K thin films using positronium annihilation lifetime spectroscopy

(5) Gidley, D W a Frieze, W E a Dull, T L a Sun, J N a Yee, A F a

a UNIVERSITY OF MICHIGAN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; GAS ABSORPTION; PORE SIZE; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; TRANSMISSION ELECTRON MICROSCOPY;

POROUS FILMS;

THIN FILMS;

EID: 0034429829 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-612-d4.3.1 Document Type: Conference Paper

Times cited : (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.