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Volumn 148, Issue 6, 2001, Pages

Physical and Electrical Characteristics of F- and C-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides

Author keywords

[No Author keywords available]

Indexed keywords


EID: 10744221351     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1368108     Document Type: Article
Times cited : (24)

References (28)
  • 24
    • 1542581051 scopus 로고    scopus 로고
    • M.S. Thesis, National Chiao-Tung University, Hsinchu, Taiwan
    • C. N. Wang, M.S. Thesis, National Chiao-Tung University, Hsinchu, Taiwan (1999).
    • (1999)
    • Wang, C.N.1
  • 28
    • 1542581049 scopus 로고    scopus 로고
    • Private communication
    • M. S. Tsai, Private communication.
    • Tsai, M.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.