Changes in refractive index and in chemical state of synchrotron radiation irradiated fluorinated polyimide films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2470-2474

  Maruo, Yasuko Yamada ^a   Sasaki, Shigekuni ^a   Haga, Tsuneyuki ^a   Kinoshita, Hiroo ^a   Horiuchi, Toshiyuki ^a   Tamamura, Toshiaki ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CHEMICAL MODIFICATION; FLUORINE; PLASTIC FILMS; RADIATION EFFECTS; REFRACTIVE INDEX; SURFACES; SYNCHROTRON RADIATION; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STATE; FILM THICKNESS; FLUORINATED POLYIMIDE FILMS; LARGE AREA PATTERNING; POLARIZABILITY;

POLYIMIDES;

EID: 0030193497     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580003     Document Type: Article

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