Templating nanoporosity in thin-film dielectric insulators

Advanced Materials

Volumn 10, Issue 13, 1998, Pages 1049-1053

  Hedrick, James L ^a   Miller, Robert D ^a   Hawker, Craig J ^a   Carter, Kenneth R ^a   Volksen, Willi ^a   Yoon, Do Y ^a   Trollsås, Mikael ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMERS; DIELECTRIC FILMS; FOAMED PLASTICS; MACROMOLECULES; MICROPROCESSOR CHIPS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; POLYIMIDES; POROSITY; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES; VITRIFICATION;

THERMOLYSIS;

ELECTRIC INSULATORS;

EID: 0032166845     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F     Document Type: Article

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