Organic and inorganic spin-on polymers for low-dielectric-constant applications

MRS Bulletin

Volumn 22, Issue 10, 1997, Pages 33-38

  Hacker, Nigel P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ETCHING; INORGANIC POLYMERS; METALLIZING; MOISTURE; ORGANIC POLYMERS; PERMITTIVITY; PHOTORESISTS; POLYIMIDES; PROCESSING; THERMODYNAMIC STABILITY;

LOW DIELECTRIC CONSTANT MATERIALS; ORGANOSILSESQUIOXANES; SPIN ON POLYMERS;

POLYMERS;

EID: 0031256462     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/s0883769400034175     Document Type: Article

References (26)

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