Thickness dependence of morphology and mechanical properties of on-wafer low-k PTFE dielectric films

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 413-417

  Wang, Jinguo ^a   Kim, H K ^a   Shi, Frank G ^a   Zhao, Bin ^b   Nieh, T G ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Rockwell Semiconductor Systems   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MORPHOLOGY; OPTICAL MICROSCOPY; PLASTIC FILMS; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; ULTRATHIN FILMS; X RAY CRYSTALLOGRAPHY;

POLARIZED OPTICAL MICROSCOPY (POM);

DIELECTRIC FILMS;

EID: 0034509529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01434-6     Document Type: Article

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