SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 527-532

From tribological coatings to low-k dielectrics for ULSI interconnects

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

Dielectric constant; Hydrogenated diamond like carbon (DLC); Tribological coatings

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; OPTIMIZATION; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; SILICA; ULSI CIRCUITS;

TRIBOLOGICAL COATINGS;

DIAMOND LIKE CARBON FILMS;

EID: 0035507851 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01313-X Document Type: Conference Paper

Times cited : (30)

References (21)

1
- 0035248170
- (2001) Diamond Relat. Mater. , vol.10 , pp. 234
- Grill, A.¹

2
- 0006755712
- (1995) Mater. Res. Soc. Symp. Proc. , vol.381

3
- 0006833345
- (1996) Mater. Res. Soc. Symp. Proc. , vol.443

4
- 0006754278
- (1997) Mater. Res. Soc. Symp. Proc. , vol.476

5
- 0006755198
- (1998) Mater. Res. Soc. Symp. Proc. , vol.511

6
- 0006755023
- (1999) Mater. Res. Soc. Symp. Proc. , vol.565

7
- 0006789980
- (2001) Mater. Res. Soc. Symp. Proc. , vol.612

8
- 0001161143
- (1998) Electrochem. Soc. Proc. Ser. , vol.98 , Issue.3 , pp. 118
- Grill, A.¹ Jahnes, C.² Ott, J.³ Patel, V.⁴ Hummel, J.⁵ Mih, R.⁶ Liu, J.⁷

9
- 0004098340
- November
- (2000) 2000 Chemical & Engineering News , pp. 17
- McCoy, M.¹

10
- 0002540659
- R. Haveman, J. Schmitz, H. Komiyama, K. Tsubouchi (Eds.), Materials Research Society, Pittsburg, PA
- (1997) Advanced Metallization and Interconnect Systems for ULSI Applications in 1996 , pp. 417
- Grill, A.¹ Patel, V.² Cohen, S.A.³ Edelstein, D.C.⁴ Paraszczak, J.R.⁵ Jahnes, C.⁶

11
- 0033300359
- (1999) Mater. Res. Soc. Symp. Proc. , vol.565 , pp. 107
- Grill, A.¹ Perraud, L.² Patel, V.³ Jahnes, C.⁴ Cohen, S.⁵

12
- 0034428370
- (2000) Mater. Res. Soc. Symp. Proc. , vol.612
- Grill, A.¹ Patel, V.²

13
- 0028375833
- (1994) Diamond Relat. Mater. , vol.3 , pp. 281
- Grill, A.¹ Patel, V.² Cohen, S.A.³

14
- 0001933413
- K.E. Spear, J.P. Dismukes (Eds.), John Wiley and Sons, New York
- (1994) Synthetic Diamond: Emerging CVD Science and Technology , pp. 91
- Grill, A.¹ Meyerson, B.²

15
- 0030700981
- (1997) Mater. Res. Soc. Symp. Proc. , vol.443 , pp. 155
- Grill, A.¹ Patel, V.² Saenger, K.L.³ Jahnes, C.⁴ Cohen, S.A.⁵ Schrott, A.G.⁶ Edelstein, D.C.⁷ Paraszczak, J.R.⁸

16
- 0032293099
- (1998) Mater. Res. Soc. Symp. Proc. , vol.511 , pp. 223
- Grill, A.¹ Jahnes, C.² Patel, V.³ Ott, J.⁴ Hummel, J.⁵ Mih, R.⁶ Liu, J.⁷

17
- 0032074699
- (1998) J. Electrochem. Soc. , vol.145 , pp. 1649
- Grill, A.¹ Patel, V.² Jahnes, C.³

18
- 0031143060
- (1997) J. Electrochem. Soc. , vol.144 , pp. 1797
- Takeishi, S.¹ Kudo, H.² Shinohara, R.³ Hashino, M.⁴ Fukuyama, S.⁵ Yamaguchi, J.⁶ Yamada, M.⁷

19
- 0031335005
- (1997) Mater. Res. Soc. Symp. Proc. , vol.476 , pp. 25
- Hacker, N.P.¹ Davis, G.² Figge, L.³ Krajewski, T.⁴ Lefferts, S.⁵ Nedbal, J.⁶ Spear, R.⁷

20
- 84962881499
- (2000) Proceedings of the IEEE 2000 International Interconnect Technology Conference , pp. 52
- Wang, B.K.¹ Loboda, M.J.² Cerny, G.A.³ Schneider, R.F.⁴ Seifferly, J.A.⁵ Washer, T.⁶

21
- 0032291667
- (1998) Mater. Res. Soc. Symp. Proc. , vol.511 , pp. 33
- Cook, R.F.¹ Liniger, E.G.² Klaus, D.³ Simonyi, E.E.⁴ Cohen, S.A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.