In situ ERDA studies of ion drift processes during anodic bonding of alkali-borosilicate glass to metal

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 674-679

  Kreissig, U ^a   Grigull, S ^a   Lange, K ^b   Nitzsche, P ^a   Schmidt, B ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b UNIVERSITY OF BERN   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ALUMINUM FOIL; ANODIC OXIDATION; BOROSILICATE GLASS; CHLORINE; HYDROGEN; INTERFACES (MATERIALS); ION BEAMS; IONIZATION CHAMBERS; OXYGEN; SILICON SENSORS; SODIUM;

ANODIC BONDING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); ION DRIFT PROCESSES;

GLASS BONDING;

EID: 0032020953     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00778-7     Document Type: Article

References (16)

1. H. Baumann, S. Mack, H. Münzel, in: C.E. Hunt et al. (Eds.), Semiconductor Wafer Bonding, PV 95-7, The Electrochemical Society Proceedings Series, Pennington, 1995, p. 471.
2. A. Cozma, B. Puers, J. Micromech. Microeng. 5 (1995) 98.
3. K.B. Albaugh, D.R. Rasmussen, J. Am. Ceram. Soc. 75 (1992) 2644.
4. M. Toyoda, Y. Fujiya, M. Nayama, T. Yamada, Transp. Japan Welding Soc. 24 (1993) 3.
5. J. Goschnik, D. Maas, J. Schuricht, H.J. Ache, Fresenius J. Anal. Chem. 346 (1993) 323.
6. D.E. Carlson, K.W. Hang, G.F. Stockdale, J. Am. Ceram. Soc. 57 (1974) 295.
7. D.S. Hurd, R. Caretta, W.W. Gerberich, J. Mater. Res. 10 (1995) 387.
8. S. Grigull, R. Behrisch, U. Kreissig, M. Harz, Fresenius J. Anal. Chem. 353 (1995) 578.
9. U. Kreissig, R. Grötzschel, R. Behrisch, Nucl. Instr. and Meth. B 85 (1994) 71.
10. E. Hentschel, R. Kotte, H.G. Ortlepp, F. Stary, D. Wohlfahrt, Nucl. Instr. and Meth. B 43 (1989) 82.
11. S. Grigull, U. Kreissig, H. Huber, W. Assmann, Nucl. Instr. and Meth., to be submitted.
12. C. Spaeth, F. Richter, S. Grigull, U. Kreissig, submitted.
13. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, vol. 1, Pergamon Press, New York, 1985.
14. Data sheet of Schröder Spezialglas, Hamburg.
15. H. Scholze, Glas - Natur, Struktur und Eigenschaften, Springer Verlag, Berlin, Heidelberg, New York, 1988, p. 305.
16. P. Nitzsche, K. Lange, B. Schmidt, S. Grigull, U. Kreissig, H. Huber, W. Assmann, B. Thomas, K. Herzog, Forschungszentrum Rossendorf, Report FZR-184 (1997).