Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering

Journal of Applied Physics

Volumn 87, Issue 3, 2000, Pages 1193-1200

  Wu, Wen Li ^a   Wallace, William E ^a   Lin, Eric K ^a   Lynn, Gary W ^a,c   Glinka, Charles J ^a   Ryan, E Todd ^b   Ho, Huei Min ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

^c UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001800379     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371997     Document Type: Article

References (19)

1. G. K. Rao, Multilevel Interconnect Technology (McGraw-Hill, New York, 1993).
2. C. Jin, J. D. Luttmer, D. M. Smith, and T. A. Ramos, MRS Bull. 22(10), 39 (1997).
3. L. W. Hrubesh, L. E. Keene, and V. R. Latorre, J. Mater. Res. 8, 1736 (1993).
4. M. Grasserbauer and H. W. Werner, Analysis of Microelectronic Materials and Devices (Wiley, New York, 1991).
5. M. P. Petkov, M. H. Weber, K. G. Lynn, K. P. Rodbell, and S. A. Cohen, Appl. Phys. Lett. 74, 2146 (1999).
6. D. W. Gidley, W. E. Frieze, T. L. Dull, A. F. Yee, E. T. Ryan, and H. M. Ho, Phys. Rev. B 60, R5157 (1999).
7. M. P. Petkov, M. H. Weber, K. G. Lynn, K. P. Rodbell, and S. A. Cohen, J. Appl. Phys. 86, 3104 (1999).
8. J. Lekner, Theory of Reflection (Nijhoff, Dordrecht, 1987).
9. S. Dietrich and A. Haase, Phys. Rep. 260, 1 (1995).
10. E. Chason and T. M. Mayer, Crit. Rev. Solid State Mater. Sci. 22, 1 (1997).
11. J. S. Higgins and H. C. Benoit, Polymers and Neutron Scattering (Oxford University Press, Oxford, 1994).
12. Certain commercial materials and equipment are identified in this article in order to specify adequately the experimental procedure. In no case does such identification imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the items identified are necessarily the best available for the purpose.
13. A. T. Ramos, K. Roderick, A. Maskara, and D. Smith, Mater. Res. Soc. Symp. Proc. 443, 91 (1997).
14. B. C. Jin, S. List, S. Yamanaka, W. W. Lee, K. Taylor, W. Y. Hsu, L. Olsen, J. Luttmer, and R. Havemann, Mater. Res. Soc. Symp. Proc. 443, 99 (1997).
15. L. G. Parratt. Phys. Rev. 95, 359 (1954).
16. D. L. Ho, R. M. Briber, R. L. Jones. S. K. Kumar, and T. P. Russell, Macromolecules 31, 9247 (1998).
17. J. R. Tesmer and M. Nastasi, Handbook of Modern Ion Beam Materials Analysis (Materials Research Society, Pittsburgh, 1995).
18. Q. Pan, G. B. Gonzales, R. J. Composto, W. E. Wallace, B. Arkles, L. K. Figge, and D. H. Berry, Thin Solid Films 345, 244 (1999).
19. P. Debye, H. R. Anderson, and H. Brumberger, J. Appl. Phys. 28, 679 (1957).