Critical role of degassing for hot aluminum filling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2091-2098

  Proost, J ^a   Kondoh, E ^a,b   Vereecke, G ^a   Heyns, M ^a   Maex, K ^a  

^a IMEC   (Belgium)

^b KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009906232     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590133     Document Type: Article

References (17)

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