Low dielectric constant mesoporous silica films through molecularly templated synthesis

Advanced Materials

Volumn 12, Issue 4, 2000, Pages 291-294

  Baskaran, Suresh ^a   Liu, Jun ^a   Domansky, Karel ^a   Kohler, Nathan ^a   Li, Xiahong ^a   Coyle, Christopher ^a   Fryxell, Glen E ^a   Thevuthasan, Suntharampillai ^a   Williford, Ralph E ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELASTIC MODULI; PERMITTIVITY; POROSITY; SILICA; SURFACE ACTIVE AGENTS; SURFACE CHEMISTRY; SURFACE STRUCTURE; TEXTURES; X RAY PHOTOELECTRON SPECTROSCOPY;

SPIN COATING;

DIELECTRIC FILMS;

EID: 0033886937     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4095(200002)12:4<291::AID-ADMA291>3.0.CO;2-P     Document Type: Article

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