Probing diffusion barrier integrity on porous silica low-k thin films using positron annihilation lifetime spectroscopy

Journal of Applied Physics

Volumn 89, Issue 9, 2001, Pages 5138-5144

  Sun, Jia Ning ^a   Gidley, David W ^a   Dull, Terry L ^a   Frieze, William E ^a   Yee, Albert F ^a   Ryan, E Todd ^b,c   Lin, Simon ^b   Wetzel, Jeff ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SEMATECH   (United States)

^c MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035340124     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1360704     Document Type: Article

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