Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy

Applied Physics Letters

Volumn 80, Issue 24, 2002, Pages 4594-4596

  Flannery, C M ^a   Wittkowski, T ^b   Jung, K ^b   Hillebrands, B ^b   Baklanov, M R ^c  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^b Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BRILLOUIN LIGHT SCATTERING; CRITICAL PROPERTIES; INDEPENDENT MEASUREMENT; LOW-DIELECTRIC CONSTANT FILM; METHYLSILSESQUIOXANE; NANO-POROUS; NANOMETER PORES; POROUS FILM; STIFFNESS PROPERTIES; SURFACE ACOUSTIC WAVE SPECTROSCOPY; YOUNG'S MODULUS;

ACOUSTIC SPECTROSCOPY; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; BRILLOUIN SCATTERING; MECHANICAL PROPERTIES; POROSITY;

ACOUSTIC WAVE SCATTERING;

EID: 79956054897     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1478775     Document Type: Article

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