Determination of pore size distribution in thin films by ellipsometric porosimetry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 3, 2000, Pages 1385-1391

  Baklanov, M R ^a   Mogilnikov, K P ^b   Polovinkin, V G ^b   Dultsev, F N ^b  

^a IMEC   (Belgium)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; PORE SIZE; POROSIMETERS; REFRACTIVE INDEX; SUBSTRATES; THIN FILMS;

ELLIPSOMETRIC POROSIMETRY;

DIELECTRIC FILMS;

EID: 0034187895     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591390     Document Type: Article

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