Thermomechanical properties and moisture uptake characteristics of hydrogen silsesquioxane submicron films

Applied Physics Letters

Volumn 74, Issue 7, 1999, Pages 944-946

  Zhao, Jie Hua ^a   Malik, Irfan ^a   Ryan, Todd ^a   Ogawa, Ennis T ^a   Ho, Paul S ^a   Shin, Wei Yan ^b   McKerrow, Andrew J ^b   Taylor, Kelly J ^b  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001008454     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123417     Document Type: Article

References (13)

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