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Physical Review B - Condensed Matter and Materials Physics

Volumn 65, Issue 9, 2002, Pages 942051-942056

Thermal conductivity and sound velocities of hydrogen-silsesquioxane low-k dielectrics

(5) Costescu, Ruxandra M a Bullen, Andrew J a Matamis, George a,b O’Hara, Keith E a,c Cahill, David G a

a University of Illinois at Urbana Champaign (United States)

b San Disk Corp (United States)

c Integrated Micromachines Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; OXIDE; SILICATE;

ARTICLE; DENSITY; DIELECTRIC CONSTANT; ELLIPSOMETRY; FILM; INTERFEROMETRY; MEASUREMENT; MODEL; PREDICTION; SOUND; SPECTROMETRY; TEMPERATURE DEPENDENCE; THEORY; THERMAL CONDUCTIVITY; THICKNESS; ULTRASOUND;

EID: 0036496754 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevB.65.094205 Document Type: Article

Times cited : (75)

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