SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Materials Research Society Symposium - Proceedings

Volumn 612, Issue , 2000, Pages

Characterisation of low-K dielectric films by ellipsometric porosimetry

(2) Baklanov, M R a Mogilnikov, K P a

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; PORE SIZE; POROSIMETERS; POROSITY; POROUS MATERIALS; REFRACTIVE INDEX; THERMODYNAMIC STABILITY; THIN FILMS;

ELLIPSOMETRIC POROSIMETRY;

DIELECTRIC FILMS;

EID: 0034428389 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-612-d4.2.1 Document Type: Conference Paper

Times cited : (15)

References (19)

1
- 34547777560
- Methods for the characterization of porous structure in membrane materials
- Chapter 4, ed. A.J. Burrgraaf and L. Cot (Elsevier)
- (1996) Fundamentals of Inorganic membrane Science and Technology , pp. 67-118
- Julbe, A.¹ Ramsay, D.J.²

2
- 0001800379
- (2000) J. Appl. Phys. , vol.87 , Issue.1 , pp. 1193
- Wu, W.¹ Wallace, W.E.² Lin, E.³ Lynn, G.W.⁴ Glinka, C.J.⁵ Ryan, R.T.⁶ Ho, H.⁷

3
- 0001076418
- (2000) Appl. Phys. Lett. , vol.76 , Issue.10 , pp. 1282
- Gidley, D.W.¹ Frieze, W.E.² Dull, T.L.³ Sun, J.⁴ Yee, A.F.⁵ Nguyen, C.V.⁶ Yoon, D.Y.⁷

4
- 0003506516
- Academic Press, NY
- (1982) Adsorption, Surface Area and Porosity, 2nd ed.
- Gregg, S.J.¹ Sing, S.W.²

5
- 0003624014
- Russ.
- (1988) Poverkhnost , vol.11 , pp. 1445
- Baklanov, M.R.¹ Dultsev, F.N.² Repinsky, S.M.³

6
- 0024640691
- (1989) Thin Solid Films , vol.171 , pp. 43
- Baklanov, M.R.¹ Vasilyeva, L.L.² Gavrilova, T.A.³ Dultsev, F.N.⁴ Mogilnikov, K.P.⁵ Nenasheva, L.A.⁶

7
- 0003607874
- Orlando, FL
- (1999) 1999 SEMATECH Workshop
- Spooner, Y.¹

8
- 0033116396
- (1999) Electrochem. Sol. St. Lett. , vol.2 , Issue.4 , pp. 192
- Dultsev, F.N.¹ Baklanov, M.R.²

9
- 0003655026
- ed. J.P. Hummel, K. Endo, W.W. Lee, M.E. Mills, S.-Q. Wang
- (2000) MRS Proceeding Low-Dielectric Constant Materials , vol.565
- Mogilnikov, K.P.¹ Polovinkin, V.G.² Dultsev, F.N.³ Baklanov, M.R.⁴

10
- 0003529435
- (2000) J. Vac. Sci. Technol. B , vol.18
- Baklanov, M.R.¹ Mogilnikov, K.P.² Polovinkin, V.G.³ Dultsev, F.N.⁴

11
- 0003535119
- (1993) Sov. J. Opt. Technol. , vol.60 , Issue.2 , pp. 92
- Muranova, G.A.¹ Perveev, A.F.²

12
- 0000598562
- (1915) J. Phys. Chem. Russ. , vol.47 , pp. 805
- Gurvitsch, L.¹

13
- 0003613259
- (1967) Kinet. Kataliz , vol.8 , pp. 172
- Karnaukhov, A.P.¹

14
- 0003592663
- (1971) Kinet. Kataliz , vol.12 , pp. 457
- Ione, K.G.¹ Karnaukhov, A.P.² Kuon, E.E.³

15
- 0003686759
- private communication
- Ramsay, J.D.F.¹

16
- 22844455311
- (1999) J. Vac. Sci. Technol. , vol.B17 , Issue.5 , pp. 2136-2146
- Baklanov, M.R.¹ Muroyama, M.² Judelewicz, M.³ Kondoh, E.⁴ Li, H.⁵ Waeterloos, J.J.⁶ Vanhaelemeersch, S.⁷ Maex, K.⁸

17
- 0003608757
- to be published
- Shamiryan, D.G.¹ Baklanov, M.R.²

18
- 4243971346
- Adsorption in silica compacts containing pores odf molecular size
- Pore Structure and Properties of Materials, Part 1, Academia Prague
- (1973) Proc. Int. Symp.IUPAC
- Ramsay, J.D.F.¹ Avery, R.G.²

19
- 0002522325
- Permeation of gases and vapours in polymers
- ed. J. Comin, Chapter 2, Elsevier, 19..
- Polymer Permeability , pp. 11-73
- Rogers, C.E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.