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Volumn 30, Issue 4, 2000, Pages 491-496
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Characterization of porous dielectric films by ellipsometric porosimetry
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
DEPOSITION;
ELLIPSOMETRY;
NUMERICAL ANALYSIS;
ORGANIC SOLVENTS;
PORE SIZE;
POROSITY;
POROUS MATERIALS;
REFRACTIVE INDEX;
SURFACE STRUCTURE;
SWELLING;
THERMODYNAMIC STABILITY;
ADSORPTION POROSIMETRY;
ELLIPSOMETRIC POROSIMETRY;
POROUS DIELECTRIC FILMS;
SURFACE AREA;
DIELECTRIC FILMS;
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EID: 0034438250
PISSN: 00785466
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (9)
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References (5)
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